CADAIR | Advanced VOCs Waste Gas Treatment Solution for Semiconductor Manufacturing
Recently, CADAIR, a professional semiconductor VOCs treatment manufacturer, successfully completed a customized waste gas treatment project for a leading silicon carbide (SiC) power device manufacturer in Ningbo, Zhejiang Province, China. The project has officially passed acceptance inspection, with all post-treatment emission indicators outperforming applicable national and local environmental standards.
Designed with a treatment air volume of 30,000 m³/h, the system adopts an advanced “Pretreatment + Zeolite Rotor + Thermal Oxidizer (TO)” process. By leveraging a 15-times concentration ratio, the solution achieves efficient VOCs purification, stable compliant emissions, and lower operating costs, providing a replicable environmental protection model for the silicon carbide semiconductor and power electronics industry.
Environmental Compliance Upgrade for a Silicon Carbide Semiconductor Enterprise
As a key enterprise in China’s third-generation semiconductor industry, the Ningbo-based SiC power device manufacturer produces silicon carbide power devices widely used in:
- New energy vehicles (NEV)
- Photovoltaic systems
- Energy storage systems
- Data center power supplies
- Automotive electronics
Driven by rapid growth in the new energy industry, the enterprise has continuously expanded production capacity, resulting in a significant increase in industrial exhaust emissions to 30,000 m³/h.
During semiconductor manufacturing processes such as epitaxy, etching, and cleaning, large quantities of organic solvents are used, generating complex semiconductor waste gas containing:
- Volatile Organic Compounds (VOCs)
- Silicon dust particles
- Process exhaust contaminants
At the same time, semiconductor environmental regulations require strict compliance with VOCs emission standards and particulate emission control. The enterprise urgently needed a customized waste gas treatment solution capable of balancing:
- Environmental compliance
- Energy efficiency
- Stable operation
- Long-term operating cost control
After comprehensive technical evaluation and supplier screening, the customer selected CADAIR as its strategic environmental protection partner.
CADAIR stood out with:
- Extensive semiconductor industry experience
- Customized engineering capabilities
- More than 1,300 equipment installations
- Service support for over 1,000 customers worldwide
- Proven project experience with leading semiconductor enterprises including BOE and ASML
The cooperation successfully established a new environmental benchmark for semiconductor VOCs treatment in China.
Challenges in Waste Gas Treatment for Silicon Carbide Power Device Manufacturing
Waste gas generated during SiC semiconductor manufacturing presents highly complex operating conditions and significant treatment challenges.
1. Complex Composition with Gas-Solid Mixed Pollutants
The exhaust gas contains both:
- Gaseous VOC pollutants generated from cleaning and etching solvents
- Silicon dust particles generated during epitaxy processes
The coexistence of particulate matter and gaseous contaminants makes conventional single-process treatment technologies insufficient.
2. Large Air Volume with Low VOC Concentration
The project involves:
- Air volume: 30,000 m³/h
- Low inlet VOC concentration
This creates a typical “large air volume, low concentration” VOCs treatment scenario.
Traditional RTO systems face multiple issues under such conditions:
- Difficulty maintaining self-sustaining combustion
- Continuous natural gas supplementation required
- Excessively high operating costs
- Thermal ceramic clogging caused by silicon dust accumulation
3. Strict Semiconductor Industry Emission Standards
The semiconductor industry requires:
- High VOC removal efficiency
- Stable particulate control
- Long-term continuous compliance
- Reliable system operation
Conventional solutions such as direct RTO or standalone adsorption systems cannot simultaneously achieve:
- High purification efficiency
- Stable operation
- Economic feasibility
- Long-term reliability
Therefore, a customized integrated treatment solution became essential.
Customized Semiconductor Waste Gas Treatment Solution by CADAIR
Based on the unique characteristics of SiC semiconductor waste gas, CADAIR developed a customized “Pretreatment + Zeolite Rotor + Thermal Oxidizer (TO)” solution.
Instead of applying a generic industrial VOCs treatment design, the CADAIR engineering team conducted a detailed investigation of:
- Semiconductor production workflows
- Waste gas composition
- VOC concentration fluctuations
- Site layout conditions
- Future expansion requirements
Within three days, CADAIR delivered a customized engineering proposal specifically designed for the customer’s operating conditions.
Waste Gas Treatment Process Flow
Step 1: Pretreatment System
The waste gas first enters the pretreatment unit, where:
- Silicon dust particles are removed
- Humidity is reduced
- System stability is improved
This stage effectively protects downstream adsorption and oxidation equipment.
Step 2: Zeolite Rotor VOC Concentration
After pretreatment, the exhaust gas enters the zeolite rotor adsorption system.
Key functions include:
- Efficient VOC adsorption
- 15-times VOC concentration ratio
- Significant reduction of downstream thermal treatment load
The purified clean air is discharged directly after adsorption.
Step 3: Thermal Oxidizer (TO)
The high-concentration desorption gas then enters the Thermal Oxidizer (TO), where VOCs are completely decomposed into:
- CO₂
- H₂O
through high-temperature oxidation.
Compared with direct thermal oxidation, the zeolite rotor + TO combination significantly reduces:
- Natural gas consumption
- Operating costs
- Energy waste
while maintaining stable compliant emissions.
CADAIR Zeolite Rotor Technology and Industry Recognition
CADAIR’s zeolite rotor concentration technology has been officially included in the:
National Catalogue of Encouraged Major Environmental Protection Technology Equipment (2020 Edition)
In addition, CADAIR has participated in drafting multiple industry technical standards, including:
- Technical Requirements for Rotary Zeolite Adsorption and Concentration Units
- Zeolite Honeycomb Adsorbents for Industrial Organic Waste Gas Purification
These achievements demonstrate CADAIR’s technical leadership in semiconductor VOCs treatment and industrial waste gas purification.
Stable Project Operation and Successful Acceptance
Following commissioning and a full quarter of continuous operation testing, the system demonstrated:
- Stable compliant emissions
- Reliable long-term operation
- Consistent adsorption efficiency
- Lower-than-expected operating costs
The zeolite rotor system maintained stable adsorption performance without efficiency degradation.
Operational data verified that the “Zeolite Rotor + TO” process is highly suitable for:
- Large air volume VOCs treatment
- Low concentration industrial exhaust gas
- Semiconductor manufacturing emissions
- Precision electronics production environments
The project successfully passed environmental acceptance inspection and established a replicable semiconductor waste gas treatment model.
Comprehensive Lifecycle Service Support
CADAIR provides full-process environmental engineering services, including:
- Site survey and analysis
- Process design
- Equipment manufacturing
- Installation and commissioning
- Operator training
- Acceptance support
- After-sales maintenance
The intelligent operation and maintenance platform enables:
- Real-time system monitoring
- Mobile APP management
- Data visualization
- Fault warning functions
ensuring long-term stable operation for semiconductor manufacturing customers.
Project Significance for the Semiconductor Industry
The successful implementation of this semiconductor waste gas treatment project not only helps the SiC power device manufacturer achieve:
- Environmental compliance upgrades
- VOCs emission reduction
- Operating cost optimization
- Green manufacturing transformation
but also provides valuable practical experience for:
- Semiconductor manufacturers
- Silicon carbide power device enterprises
- Third-generation semiconductor factories
- Precision electronics manufacturers
across China and global markets.
As the semiconductor industry accelerates the development of:
- New energy technologies
- Electric vehicles
- Energy storage systems
- AI data centers
- Digital infrastructure
CADAIR continues to support sustainable industrial development with advanced environmental protection technologies.
As a professional semiconductor VOCs treatment manufacturer, CADAIR remains committed to delivering:
- Scientific environmental solutions
- Green manufacturing technologies
- Sustainable industrial VOCs treatment systems
- Customized semiconductor exhaust gas purification solutions
for global industrial enterprises.
Choosing the right environmental protection partner is more important than simply choosing equipment — this is the long-term cooperation philosophy that CADAIR consistently practices.
