Welocme to Cadair

Case Study | Tianjin, China: Another Semiconductor Exhaust Gas Treatment Project Successfully Commissioned by CADAIR

Another successful project for CADAIR in Tianjin!

Recently, CADAIR successfully completed and commissioned an exhaust gas treatment project for a semiconductor manufacturing enterprise in Tianjin.

Designed to treat organic exhaust gases generated during the cleaning process, including n-propyl bromide and acetone, the project adopts a core process combining a Zeolite Concentrator Wheel with a Three-Bed Regenerative Thermal Oxidizer (RTO), delivering efficient treatment of 30,000 m³/h of exhaust gas.

Performance testing confirmed stable system operation, with all emission parameters meeting both design specifications and environmental compliance requirements, providing reliable support for the customer’s sustainable manufacturing operations.

Process Flow

Exhaust Gas Collection → Pretreatment Unit → Zeolite Concentrator Wheel → Three-Bed RTO → Stack

High-Efficiency Treatment with Stable Compliance

The project utilizes a Zeolite Concentrator Wheel + Three-Bed RTO process, achieving an adsorption efficiency of over 98% and an RTO removal efficiency of over 99%.

Acceptance test results showed:

  • TVOC ≤ 40 mg/m³
  • Non-methane Hydrocarbons (NMHC) ≤ 20 mg/m³

All emission indicators fully comply with Tianjin Industrial Enterprise Volatile Organic Compounds Emission Control Standard (DB12/524-2020).

Energy-Efficient Operation with Lower Operating Costs

By utilizing zeolite concentration technology, the system concentrates 30,000 m³/h of high-volume, low-concentration exhaust gas into approximately 3,000 m³/h, significantly reducing both RTO sizing requirements and long-term operating costs while maintaining high treatment efficiency.

Deep Expertise in the Semiconductor Industry

Semiconductor manufacturing involves a wide range of organic solvents and specialty chemicals, resulting in complex exhaust gas compositions that demand higher standards of safety, operational stability, and treatment efficiency.

Backed by extensive project experience and proven technical solutions, CADAIR continues to provide professional exhaust gas treatment systems for the electronics, semiconductor, and advanced manufacturing industries.

Driving a Greener Future

Looking ahead, CADAIR will continue to focus on industrial VOC emission control through continuous technological innovation, delivering efficient, reliable, and energy-saving environmental solutions that support the green and low-carbon transformation of the manufacturing industry.

Share the Post:

Related Posts

Welcome to Cadair website. Please fill in the following information, we will keep in touch with you.