Recently, the customized waste gas treatment project developed by CADAIR for a high-end semiconductor equipment company has successfully passed acceptance and been put into operation. Let’s take a look~
Environmental Challenges Behind High-End Manufacturing
The client is not only a high-end semiconductor equipment manufacturer with core independent intellectual property rights, but also an enterprise in China that has achieved large-scale mass production of CMP equipment on 12-inch mass production lines. Its products cover key equipment such as CMP equipment, thinning equipment, and dicing equipment, which are widely used in cutting-edge manufacturing fields including integrated circuits, advanced packaging, large silicon wafers, MEMS, and Micro LED.
However, in the precision manufacturing process of high-end semiconductor equipment, it is inevitable to generate organic waste gas and acid-base waste gas with complex components. If these waste gases are not effectively treated, they will not only affect the air quality of the workshop and the health of employees, but also may have an impact on the environment. Therefore, constructing a waste gas treatment solution for semiconductor equipment companies that meets environmental emission standards and matches actual production needs has become a key link in the green development of enterprises.
Customized Waste Gas Treatment Solution for Semiconductor Equipment Companies: Precise, Efficient, and Reliable
In response to the client’s complex types of waste gas and differentiated treatment needs, Kedir adhered to the principle of “classifying by quality and precise treatment”, designed and implemented three sets of waste gas treatment systems, forming a complete closed-loop waste gas treatment solution for semiconductor equipment companies:
Waste Gas Treatment for Semiconductor Equipment Companies — Acidic Waste Gas Treatment System
- Treatment Air Volume: 20,000 m³/h
- Main Components: Acidic gases
- Treatment Process: High-efficiency acid washing waste gas treatment towers are adopted to achieve safe conversion and up-to-standard emission of acidic substances through neutralization reactions.
Waste Gas Treatment for Semiconductor Equipment Companies — Organic Waste Gas Treatment System
- Treatment Air Volume: 20,000 m³/h
- Main Components: IPA、Acetone、PGMEA、PGME、NMP
- Treatment Process: Two sets of activated carbon adsorption systems (one in use and one standby) are adopted to ensure continuous operation and efficient adsorption, realizing stable removal of VOCs.
Waste Gas Treatment for Semiconductor Equipment Companies — Alkaline Waste Gas Treatment System
- Treatment Air Volume: 30,000 m³/h
- Main Components: Alkaline gases
- Treatment Process: Neutralization and absorption are carried out through alkaline washing waste gas treatment towers to effectively control the emission of alkaline substances.
Advantages and Project Value of the Waste Gas Treatment System for Semiconductor Equipment Companies
- Full-process closed-loop management: From waste gas collection, classified transportation to purification treatment, the whole process is controlled to eliminate secondary pollution.
- “One in use, one standby” design: A standby unit is set in the organic waste gas treatment system to ensure production continuity and enhance system reliability.
- High compatibility with actual production: The system design is closely combined with the client’s production process and waste gas generation characteristics to ensure that the treatment efficiency matches the production rhythm.
As a professional provider of waste gas treatment solutions for semiconductor equipment companies, CADAIR‘s successful implementation of this project not only helps the client comply with national and local environmental protection policies, but also enhances its green image and sustainable development capabilities in the high-end manufacturing field.
