In the era of rapid technological advancement, silicon-based OLED microdisplay technology has emerged as a core window connecting the physical and virtual worlds. Boasting advantages of high brightness, high resolution, and thinness, it drives innovations in cutting-edge fields such as VR/AR and smart wearables. However, behind this stunning vision of the future, the environmental challenges posed by its manufacturing process cannot be ignored.
Recently, CADAIR successfully delivered and implemented a set of semiconductor factory waste gas treatment solutions for an enterprise specializing in silicon-based OLED microdisplay technology. This provides a solid guarantee for the enterprise to build a green, high-standard modern factory.
Customer Focus: An Innovative Force in the Semiconductor Industry
The partner in this collaboration is a leader in the silicon-based OLED microdisplay sector. It is committed to providing global customers with advanced display devices featuring high resolution, high contrast, ultra-thinness, and low power consumption. Its products are key components for building the next generation of virtual-reality integration experiences, representing the forefront of technological strength. As an enterprise that values innovation and quality, it naturally holds extremely high self-requirements for social responsibility and environmental standards in the production environment.
Treatment Challenges: The Difficulty of Semiconductor Factory Waste Gas
The production of silicon-based OLED relies on precision processes such as coating, developing, etching, and cleaning. These processes involve the extensive use of organic solvents, resulting in large-air-volume, low-concentration mixed organic waste gas. Direct emission of such waste gas not only pollutes the environment but also fails to meet increasingly stringent environmental emission regulations. Therefore, selecting a stable, efficient, and thorough semiconductor factory waste gas treatment solution is crucial for enterprises to fulfill social responsibilities and build a “green factory” brand image.
Semiconductor Factory Waste Gas Treatment Solution: The Golden Combination of Zeolite Rotor + TO
To address this industry-wide challenge, CADAIR leverages its profound technical accumulation to offer the “zeolite rotor + TO” golden combination solution. This process has become one of the preferred choices for semiconductor factory waste gas treatment due to its high efficiency and reliability.
- Waste Gas Volume: 19,000 m³/h
- Treatment Process: Zeolite Rotor + TO (Thermal Oxidizer)
- Removal Efficiency: ≥95%
Process Flow
Semiconductor factory waste gas is transported to the zeolite rotor via the main process fan. VOCs in the waste gas are adsorbed by the zeolite, allowing the treated gas to be discharged into the atmosphere up to standard. Hot air delivered by the desorption fan desorbs VOCs from the zeolite. The desorbed VOCs are then transported to the TO reactor by the TO fan, where they are oxidized into CO₂ and H₂O, and finally discharged into the atmosphere in compliance with standards.
Value Co-creation: The Harmonious Symbiosis of Technology and Environmental Protection
Third-party testing results show that the non-methane total hydrocarbons (NMHC) after treatment by the semiconductor factory waste gas solution are ≤20 mg/m³, meeting the requirements of relevant pollutant discharge standards.
“Lucid waters and lush mountains are invaluable assets.” While customers open up stunning windows to the future with silicon-based OLED microdisplay technology, CADAIR silently guards the blue sky and white clouds behind this vision with reliable environmental protection technology. CADAIR has always adhered to its environmental mission through technological strength, returning a fresh world to all!
