We are pleased to announce the successful commissioning and acceptance of a VOC abatement system for a semiconductor wafer fabrication facility located in Beijing, North China.
This milestone demonstrates our capability to deliver high-performance VOC treatment systems that meet strict environmental and safety standards.
🔧 Project Overview
- Industry: Semiconductor (Wafer Fab)
- Application: Cleanroom exhaust treatment
- Air Volume: 26,400 CMH
- Technology: Zeolite Rotor + Thermal Oxidizer (TO)
- Concentration Ratio: ≥18:1
🏭 Semiconductor Industry Challenge
In wafer fabrication processes such as photolithography, coating, and cleaning, large volumes of low-concentration VOC exhaust gases are generated.
These emissions typically come from cleanroom environments, which require:
- 24/7 continuous operation
- High safety standards (explosion-proof design)
- Stable and compliant emission control
This makes VOC abatement for semiconductor fabs significantly more demanding than in many other industries.
🚀 Solution Highlights
✔ Designed for Cleanroom Exhaust
Optimized for large air volume and low VOC concentration scenarios typical in semiconductor fabs.
✔ High-Efficiency VOC Concentration
The zeolite rotor achieves a concentration ratio of ≥18:1, reducing airflow by over 90% and improving overall system efficiency.
✔ Stable Thermal Oxidation Performance
The thermal oxidizer operates at temperatures up to 750°C, ensuring reliable VOC destruction and compliance.
✔ Continuous Operation Capability
Engineered to support 24/7 fab operation, ensuring long-term stability.
✔ Energy & Cost Optimization
Reduced airflow leads to an estimated 20–30% reduction in operational cost.
✅ Commissioning Results
The system has been successfully commissioned and is now:
- Operating stably under continuous conditions
- Achieving reliable VOC removal performance
- Meeting emission compliance requirements
🌍 Backed by 1600+ Projects
With over 1,600 environmental engineering projects delivered, we have built extensive experience in:
- Semiconductor VOC treatment
- Cleanroom exhaust systems
- Industrial air pollution control
More importantly, we continue to deliver and commission new projects on an ongoing basis, ensuring consistent performance and long-term client trust.
💡 Final Thoughts
As semiconductor manufacturing continues to expand globally, the demand for reliable, scalable VOC abatement systems will only grow.
This project is another example of how proven technology and strong delivery capability can support high-end manufacturing environments.
