Delivered to High Standards, Safeguarding Green Chip Manufacturing
Introduction
Recently, the waste gas treatment project for a 6-inch Micro LED wafer fabrication and packaging test base in Zhuhai, undertaken by CADAIR, has successfully passed acceptance. The project adopts a split treatment solution combining “fixed zeolite bed + regenerative thermal oxidizer (RTO)” and “acid-base waste gas scrubber” to deliver efficient treatment. All emission indicators steadily outperform design requirements, providing safe, stable and eco-friendly environmental protection support for high-end display chip manufacturing.
Project Background: Deep Cultivation in High-End Display Chips
The client is a leading domestic technology enterprise focusing on the R&D and mass production of Micro LED display technology.
Micro LED adopts self-luminous micron-scale LEDs (typically smaller than 50μm) as light-emitting pixel units, widely applied in:
- AR/VR near-eye displays
- Automotive displays
- Optical interconnection for intelligent computing centers
- New-generation high-end displays
Project Challenges: Dual Tests of Complex Working Conditions & High-Precision Production Lines
Core processes including photolithography, development, etching, cleaning and packaging curing adopt various organic solvents, generating VOC organic waste gas and acid-base waste gas.
The waste gas features complex compositions and fluctuating concentrations. Meanwhile, the treatment system must meet the following requirements:
- Stable compliance with emission standards in long-term operation
- High reliability to guarantee production continuity
- Low energy consumption during operation
- Compatibility with future stricter environmental regulations
Solution: Customized Split Treatment Scheme Tailored to Local Conditions
Based on the project characteristics, CADAIR adopts the design concept of classified collection and split treatment, equipping optimal treatment processes for different types of waste gas to realize precise, efficient and low-carbon treatment.
Organic Waste Gas Treatment System
| Item | Parameter |
|---|---|
| Treatment Air Volume | 90,000 m³/h |
| Waste Gas Components | Propylene glycol methyl ether acetate, trimethylamine, N-methylpyrrolidone (NMP), ethanol, etc. |
| Waste Gas Concentration | 66.56 mg/m³ |
| Process Route | Fixed Zeolite Bed + RTO |
| Concentration Ratio | 50 times |
| Removal Efficiency | 99% |
Process Principle
Waste gas is delivered by the main process fan to pre-treatment equipment to remove large particulate matter and substances harmful to zeolite. The pre-treated waste gas is then conveyed to the fixed zeolite bed, where VOC components in the waste gas are adsorbed by zeolite before being discharged up to standard.
VOC substances concentrated via adsorption in the fixed zeolite bed are desorbed at high temperature and fed into the three-chamber RTO. The high-concentration waste gas is heated above 750℃ inside the RTO and combusted into carbon dioxide and water before being vented to the atmosphere.
Acid-Base Waste Gas Treatment System
| Item | Parameter |
|---|---|
| Treatment Air Volume | 35,000 m³/h |
| Waste Gas Components | Acid and alkaline waste gas |
| Process Route | Scrubber Tower |
Project Acceptance: High-Standard Design & High-Quality Delivery
The design phase fully anticipates future tightened environmental policies, with the designed VOC emission concentration capped at ≤20 mg/m³, complying with Emission Control Standard for Volatile Organic Compounds of Industrial Enterprises (DB12/ 524—2020) issued by Tianjin Municipality.
Third-party inspection results confirm both waste gas treatment systems meet all design specifications, and the project has passed acceptance smoothly.
Future Outlook
CADAIR will continue to focus on the industrial organic waste gas treatment sector.
Leveraging proven engineering experience and technological innovation,
we will deliver more professional, efficient and reliable integrated waste gas treatment solutions
for industries including semiconductors, display panels, new energy and advanced new materials.
