⚡ Core Value: A comprehensive technology system covering organic waste gas, acid/alkali waste gas, special toxic gases, and ultrafine particulate matter, serving over 50 leading semiconductor enterprises and new energy industry chain customers.
Executive Summary
Photovoltaic semiconductor manufacturing is one of the most technologically complex and environmentally demanding industrial sectors globally. The waste gas produced features complex compositions, high toxicity, and significant fluctuations, imposing extreme requirements on the stability, safety, and economic viability of treatment systems.
CADAIR has been deeply engaged in the waste gas treatment field for pan-semiconductor industries for years, forming a comprehensive technology system covering organic waste gas, acid/alkali waste gas, special toxic gases, and ultrafine particulate matter.
This report systematically presents CADAIR’s:
• 💡 Customized Design Methodology
• 🔬 Core Technology Matrix
• 🏭 Benchmark Implementation Cases
It highlights CADAIR’s mature applications across the entire semiconductor industry chain, helping enterprises achieve optimal total cost of ownership and sustainable development while meeting the world’s strictest environmental standards.
1. Industry Challenges and CADAIR’s Positioning
1.1 Process Complexity and Emission Characteristics
Photovoltaic semiconductor manufacturing encompasses wafer fabrication, packaging and testing, cell production, and other processes, involving hundreds of precise procedures such as etching, cleaning, deposition, lithography, and doping. The resulting waste gas exhibits distinct characteristics: “numerous types, wide concentration range, high toxicity, and frequent process fluctuations.”
Advanced process wafer fabs and high-efficiency photovoltaic cell factories generate over 20 different types of waste gas, with several being highly toxic, spontaneously combustible, or strongly corrosive substances requiring targeted treatment technologies.
Pollutant Classification Overview
| Pollutant Category | Core Source Processes | Typical Compounds | Treatment Difficulty |
| Organic Waste Gas (VOCs) | Lithography, Cleaning, Development | Isopropanol, Acetone, PGMEA, NMP, Benzene Series | ⬆️ High |
| Acid/Alkali Waste Gas | Etching, Cleaning, Texturing | HF, HCl, H₂SO₄, NH₃, NOₓ | ⬆️ Medium-High |
| Special Process Gases | Deposition, Doping, Epitaxy | Silane (SiH₄), Phosphine (PH₃), Arsine (AsH₃), NF₃, SF₆ | ⬆️⬆️ Extremely High |
| Ultrafine Particulate Matter | Cutting, Grinding, Thermal Oxidation | Silicon Powder, Metal Oxides, Salt Mist | ⬆️ High |
1.2 Compliance Requirements and Enterprise Development Needs
With the acceleration of global carbon neutrality initiatives, environmental regulations for the photovoltaic semiconductor industry continue to tighten worldwide. Waste gas emissions have evolved from a “compliance bottom line” to an important component of core enterprise competitiveness.
🌐 Key International Standards
• SEMI S2: General Guide for Semiconductor Equipment Environmental Health and Safety
• IEC 61508: Functional Safety Standard for Industrial Control Systems
• EU REACH Regulation: SVHC (Substances of Very High Concern) Control Requirements
🇨🇳 Key Chinese Standards
• GB 39731-2020: Emission Standard for Air Pollutants in Electronic Industry
• GB 37822-2019: Standard for Unorganized Emission Control of Volatile Organic Compounds
• Local ultra-low emission and special emission limit requirements
1.3 CADAIR’s Industry Advantages
As a leading comprehensive service provider for industrial waste gas treatment in China, CADAIR has obtained ISO9001, ISO14001, and ISO45001 triple system certifications, forming four core competitive advantages in the photovoltaic semiconductor sector:
| Core Competitive Advantage | Key Benefits |
| 🔗 Full-Chain Coverage Capability | Services covering integrated circuits, compound semiconductors, panels, photovoltaic cells, and upstream raw materials across the entire industry chain |
| 🛠️ Complete Technology System | Possesses a full range of self-developed core technologies from pretreatment to end-stage precision treatment, capable of solving various complex waste gas problems |
| 📊 Extensive Engineering Experience | Has completed nearly 100 pan-semiconductor industry projects, serving globally renowned enterprises such as ASML, BOE, and CRMicro |
| ✅ Comprehensive Management System | Triple ISO system certified, establishing standardized and normalized management to ensure full-process compliance and control |
2. Core Technology System and Systematic Design Methodology
2.1 Precise Emission Characterization and Technology Matching
CADAIR adopts a “diagnose before prescribe” systematic design philosophy, providing customized optimal technical solutions for each project through two stages of precise analysis.
📋 Stage 1: Full-Process Emission Characterization Diagnosis
• 🔬 Equipment-Level Emission Monitoring: Using advanced instruments such as FTIR and GC-MS for point-by-point emission profiling of individual process equipment
• ⏱️ Temporal Fluctuation Analysis: 7×24-hour continuous monitoring to capture peak emissions and process variations during production cycles
• ⚠️ Safety Risk Assessment: Identifying potential safety hazards such as spontaneous combustion, explosion, and corrosion, with targeted protective measures developed
📋 Stage 2: Technology Solution Matching and Optimization
| CADAIR Core Technology | Applicable Waste Gas Type | Treatment Efficiency | Core Advantages |
| Zeolite Rotor Concentration + RTO/TO/CO | Medium-low concentration high-volume organic waste gas | 95%-99.9% | High thermal efficiency, stable operation, suitable for continuous production |
| Multi-stage Acid/Alkali Scrubber | Acidic, alkaline waste gas and coarse particulates | 85%-99% | Low investment cost, simple operation, modular design |
| Metal Oxide Adsorption Tower | Arsine (AsH₃), Phosphine (PH₃) and other highly toxic special gases | 99.999% | Irreversible chemical adsorption, safe and reliable, no secondary pollution |
| Thermal Plasma Technology | NF₃, SiH₄ and other difficult-to-decompose gases | 99.99% | Complete decomposition at 3000°C, non-selective; equipped with explosion-proof design for silane |
| Wet Electrostatic Precipitator (WESP) | PM2.5 and acid mist in humid waste gas | 99% | Specialized for ultrafine particles, low operating resistance |
| Activated Carbon Fixed-Bed Adsorption | Low-concentration organic waste gas and odors | 90%-95% | Low investment, quick results, suitable for emergency treatment |
2.2 Core Equipment and System Integration
CADAIR has conducted special optimization on core equipment to meet the unique requirements of the photovoltaic semiconductor industry, ensuring long-term stable system operation.
🔧 Zeolite Rotor Concentration System
- Uses imported high silica-to-alumina ratio zeolite molecular sieve with excellent temperature resistance and high adsorption capacity
- Two-stage zeolite rotor combined technology, capable of treating complex-component organic waste gas
- Concentration ratio up to 5-15 times (high silica-to-alumina ratio rotor can reach 15 times), significantly reducing the scale of downstream thermal oxidation systems
🔧 Thermal Oxidation Systems (RTO/TO/CO)
| System Type | Thermal Efficiency | VOC Destruction Efficiency | Applicable Scenarios |
| Regenerative Thermal Oxidizer (RTO) | ≥95% | ≥99.5% | High-volume medium-low concentration |
| Thermal Oxidizer (TO) | — | High | High-concentration waste gas, fast response |
| Catalytic Oxidizer (CO) | — | High | Operating temperature 300-500°C, lower energy consumption |
🔧 Special Gas Treatment Systems
- 💀 Metal Oxide Adsorption Tower: Uses specialized formula adsorbents to treat highly toxic gases such as Arsine (AsH₃) and Phosphine (PH₃)
- ⚡ Thermal Plasma Reactor: Capable of completely decomposing perfluorocarbons (PFCs) and other greenhouse gases; explosion-proof configuration for silane and other pyrophoric gases
- 🛡️ Multi-Level Safety Interlocks: Equipped with leak detection, emergency shutdown, flare venting, nitrogen purge and other safety facilities
🔧 Intelligent Control System
- 🖥️ Uses PLC+SCADA architecture to achieve full-process automated control
- 📊 Real-time monitoring of critical parameters with over-limit alarms
- ☁️ Supports remote monitoring and data upload to meet environmental regulatory requirements
2.3 Full Lifecycle Management Services
CADAIR provides one-stop services from project design to operations and maintenance, ensuring efficient system operation throughout the entire lifecycle:
| Stage | Service Content |
| Early Stage | Site survey, emission testing, solution design, EIA support |
| Mid Stage | Equipment manufacturing, installation and commissioning, performance acceptance, personnel training |
| Late Stage | Regular inspection, predictive maintenance, consumable replacement, system upgrade and renovation |
3. Industry Benchmark Case Studies and Implementation Results
3.1 Semiconductor Industry Benchmark Cases
📍 Case 1: Jiangsu Xinshun Microelectronics — High-Volume Organic Waste Gas Treatment Project
| Project Information | Details |
| 👤 Client | Jiangsu Xinshun Microelectronics Co., Ltd. |
| 📍 Location | Wuxi, Jiangsu Province |
| 🏭 Industry | Semiconductor Wafer Manufacturing |
| 🌬️ Waste Gas Components | Isopropanol, Acetone, Benzene Series, Cyclohexane, Xylene |
| 💨 Processing Air Volume | 60,000 m³/h |
| 📅 Contract Date | 2025 |
System Design Solution
• Core Process: Two-stage zeolite rotor + RTO combined process
• Two-stage rotor series design: Optimized for complex-component organic waste gas to improve concentration efficiency
• Waste heat recovery system: Recovers heat from RTO outlet for plant heating and process preheating
• Safety systems: Equipped with LEL monitoring, emergency makeup air, nitrogen purge, and other safety facilities
🎯 Operating Results
| Indicator | Actual Performance |
| VOC Removal Efficiency | ≥99%, far exceeding national standards |
| System Availability | ≥99%, synchronized operation with production equipment |
| Energy Consumption | 20% or more energy savings compared to traditional solutions |
| Environmental Compliance | Passed environmental acceptance on first attempt, long-term stable compliant emissions |
📍 Case 2: Xiamen Silan Mingjia — Special Toxic Gas Treatment Project
| Project Information | Details |
| 👤 Client | Xiamen Silan Mingjia Compound Semiconductor Co., Ltd. |
| 📍 Location | Xiamen, Fujian Province |
| 🏭 Industry | Compound Semiconductor Manufacturing |
| 💀 Waste Gas Components | Arsine (AsH₃), Phosphine (PH₃) and other highly toxic special gases |
| 💨 Processing Air Volume | 3,000 m³/h |
| 📅 Contract Date | 2024 |
System Design Solution
• Core Process: Metal Oxide Adsorption Tower Technology
• Uses specialized high-efficiency adsorbent: Completely removes highly toxic gases through irreversible chemical reactions
• Multi-stage adsorption design: One operating + one standby to ensure continuous operation
• Online monitoring system: Real-time monitoring of inlet and outlet concentrations, automatic alarm and standby tower switching when limits are exceeded
🎯 Operating Results
| Indicator | Actual Performance |
| Highly Toxic Gas Removal Efficiency | ≥99.999%, outlet concentration far below detection limits |
| Safety Performance | Zero leakage, zero accidents, passed stringent safety acceptance |
| Operating Cost | Long adsorbent service life, replacement cycle ≥2 years |
| Operations & Maintenance | High automation level, no dedicated operator required |
📍 Case 3: Huacan Optoelectronics (Zhuhai) — High-Flow Complex Organic Waste Gas Treatment Project
| Project Information | Details |
| 👤 Client | Huacan Optoelectronics (Zhuhai) Co., Ltd. |
| 📍 Location | Zhuhai, Guangdong Province |
| 🏭 Industry | Wafer Manufacturing and Packaging & Testing |
| 🌬️ Waste Gas Components | Propylene Glycol Methyl Ether Acetate, Trimethylamine, NMP, Ethanol, Acetone, Isopropanol |
| 💨 Processing Air Volume | 90,000 m³/h |
| 📅 Contract Date | 2024 |
System Design Solution
• Core Process: Zeolite fixed-bed + RTO combined process
• Multi-bed parallel design: Online switching and regeneration without affecting production
• High-efficiency heat exchange system: Maximizes heat recovery to reduce fuel consumption
• Intelligent control system: Automatically adjusts operating parameters based on inlet concentration
🎯 Operating Results
| Indicator | Actual Performance |
| VOC Removal Efficiency | ≥98.5% |
| Waste Heat Recovery Efficiency | ≥85%, saving millions of yuan in annual energy costs |
| System Stability | Continuous trouble-free operation, meeting 24-hour production requirements |
| Unorganized Emission Control | No obvious odors in the workshop, improved working environment |
📍 Case 4: Anhui Jingyi Automation — Multi-Pollutant Comprehensive Treatment Project
| Project Information | Details |
| 👤 Client | Anhui Jingyi Automation Equipment Technology Co., Ltd. |
| 📍 Location | Wuhu, Anhui Province |
| 🏭 Industry | Semiconductor Equipment Manufacturing |
| 🌬️ Waste Gas Components | Nitrogen Oxides, Acidic Waste Gas, Organic Waste Gas, Dust |
| 💨 Processing Air Volume | 153,700 m³/h |
| 📅 Contract Date | 2025 |
System Design Solution
Adopts the “Classified Collection, Differential Treatment” design philosophy
| Waste Gas Type | Treatment Process |
| Acid/Alkali Waste Gas | Multi-stage counter-current scrubbing tower with NaOH solution neutralization |
| Organic Waste Gas | Activated carbon adsorption system with regular adsorbent replacement |
| Dust | Baghouse filter + high-efficiency filter to ensure particulate matter compliant emission |
| Control | Centralized control system: Unified monitoring of all subsystem operating status |
🎯 Operating Results
• ✅ All pollutant emission concentrations exceed national standards
• ✅ Modular system design facilitates later expansion and maintenance
• ✅ Investment cost 15% lower than comparable solutions
• ✅ Stable operation, highly recognized by the client
3.2 Photovoltaic Industry Chain Related Cases and Technology Applicability
CADAIR’s core technology system fully applies to the photovoltaic industry, with successful project experience in the upstream photovoltaic supply chain and new energy materials sector.
☀️ Upstream Photovoltaic Raw Materials: Lianhe Solar Polysilicon Project
| Project Information | Details |
| 👤 Client | Lianhe Solar Polysilicon Co., Ltd. (Oman) |
| 🏭 Industry | Upstream Photovoltaic Core Raw Materials (Polysilicon) Production |
| 🔧 Treatment Process | Waste Gas Concentration & Tail Gas Treatment System |
| 📅 Contract Date | 2024 |
📌 Project Significance: Marks CADAIR’s official entry into the most upstream segment of the photovoltaic industry chain, laying a solid foundation for subsequent photovoltaic cell waste gas treatment projects
🔋 New Energy Materials: BTR Series Projects
| Project Information | Details |
| 👤 Client | Tianjin BTR, BTR (Jiangsu), BTR (Sichuan) New Energy Technology Co., Ltd. |
| 🏭 Industry | New Energy Materials (Lithium Battery Anode Materials), highly related to photovoltaic energy storage industry chain |
| 🔧 Treatment Process | Waste Gas + CO Comprehensive Treatment System |
📌 Project Results: Successfully solved complex waste gas and carbon monoxide treatment challenges in new energy materials production
🔋 Photovoltaic Cell Manufacturing — Technology Applicability Analysis
⚡ CADAIR’s core technologies highly match photovoltaic cell manufacturing waste gas treatment needs and can be directly transferred for application:
| Waste Gas Type | CADAIR Core Technology | Application Scenarios |
| Organic Waste Gas | Zeolite Rotor + RTO/TO Process | Treatment of isopropanol, acetone, etc. from lithography and cleaning processes |
| Acid/Alkali Waste Gas | Multi-stage Acid/Alkali Scrubber | Treatment of HF, HCl, etc. from texturing and etching processes |
| Special Process Gases | Thermal Plasma Technology | Treatment of NF₃, SiH₄, etc. from thin film deposition and etching processes |
| Ultrafine Particulate Matter | Wet Electrostatic Precipitator (WESP) | Treatment of silicon powder, etc. from cutting and grinding processes |
4. Future Development Trends and Strategic Layout
4.1 Technology Innovation Directions
🌱 Low-Carbon Treatment Technology
| Technology Direction | Description |
| Low-Temperature Catalytic Combustion | Reduces operating temperature by over 30%, significantly reducing carbon emissions |
| Biological Treatment Technology | Development of specialized biofilter systems for the photovoltaic semiconductor industry |
| Deep Waste Heat Utilization | Uses Organic Rankine Cycle (ORC) technology to convert waste heat into electricity |
🤖 Intelligent System Integration
| Technology Direction | Description |
| AI-Driven Optimization | Uses machine learning algorithms to adjust system operating parameters in real-time for optimal energy consumption |
| Digital Twin Technology | Establishes virtual system models for predictive maintenance and fault diagnosis |
| IoT Platform | Creates a unified environmental protection equipment management platform for multi-project centralized monitoring |
♻️ Resource Recovery and Circular Economy
| Technology Direction | Description |
| Solvent Recovery Technology | Recovers valuable chemicals such as photoresist and cleaning agents |
| Carbon Capture and Utilization | Captures CO₂ from thermal oxidation processes for resource utilization |
| Water Recycling | Treats wastewater from the treatment system for circular reuse |
4.2 Project Full-Process Implementation Framework
CADAIR provides standardized project implementation processes for photovoltaic semiconductor enterprises to ensure high-quality delivery:
📋 Stage 1: Assessment & Planning (1-3 months)
• Site survey and comprehensive emission characterization testing
• Regulatory compliance assessment and gap analysis
• Technical solution design and economic feasibility analysis
• EIA support and project initiation
📐 Stage 2: Detailed Design & Procurement (4-8 months)
• Construction drawing design and P&ID development
• Equipment procurement and manufacturing
• Construction organization design and safety planning
• Pre-service personnel training
🔧 Stage 3: Construction & Commissioning (9-12 months)
• Equipment installation and piping connection
• Individual equipment testing and integrated commissioning
• Performance testing and environmental acceptance
• Technical documentation handover and personnel certification
♻️ Stage 4: Operations & Continuous Optimization (Long-term)
• Regular inspection and predictive maintenance
• Consumable replacement and equipment upgrades
• Operational data analysis and process optimization
• Environmental policy tracking and compliance guidance
Conclusion and Strategic Outlook
The rapid development of the photovoltaic semiconductor industry has placed higher demands on waste gas treatment technology. CADAIR, leveraging its extensive experience accumulated in the semiconductor industry and complete technology system, can provide photovoltaic enterprises with safe, stable, and efficient waste gas treatment solutions.
🎯 CADAIR’s Core Success Factors
| Factor | Core Advantages |
| 🔬 Technology Leadership | Possesses self-developed full-range core technologies with independent intellectual property |
| 📊 Extensive Experience | Serves over 50 leading pan-semiconductor enterprises |
| 🎯 Customized Services | Provides personalized solutions based on customer needs |
| 🔗 Full Lifecycle Support | One-stop services from design to operations and maintenance |
| 🛡️ Safety and Reliability | Strict quality control and safety management systems |
| ✅ Compliance Assurance | Ensures compliance with the world’s strictest environmental standards |
🌿 Corporate Mission: “Protecting Green Mountains and Clear Waters, Enabling Green Manufacturing”
Looking ahead, CADAIR will continue to deeply cultivate the photovoltaic semiconductor sector, intensify technology innovation, continuously improve product performance and service quality, help more photovoltaic semiconductor enterprises achieve environmental compliance and sustainable development, and contribute to global carbon neutrality goals.
